Resolving the Blueshift in Calculations of the EUV Spectrum of Multiply Charged Tin Ions
New calculations resolve blueshift in EUV spectrum of tin ions, impacting nanolithography.
Researchers have performed ab initio relativistic calculations on the highly charged Sn$^{12+}$ ion, a key component in extreme ultraviolet (EUV) nanolithography.
Previous calculations of tin plasma EUV emissivity consistently showed a blueshift in the peak emissivity region compared to experimental results.
By optimizing numerical methods and fully saturating configuration interaction within the n=4 shell, coupled with core-valence correlation, the blueshift has been resolved, revealing a significant influence of highly excited and multiply excited states on the spectrum.
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