Optimization of EUV output by experimentally validated radiation-hydrodynamic simulations across a broad laser parameter space
New simulations validate radiation-hydrodynamic models for optimizing EUV light generation from laser-produced tin plasma.
Researchers have conducted extensive simulations to optimize the output of extreme ultraviolet (EUV) light, a critical component for semiconductor manufacturing. The study focused on laser-produced tin plasma sources, exploring over 140,000 parameter combinations.
The simulations utilized the STAR-1D radiation-hydrodynamics code, which has been validated against experimental results. This validation ensures the accuracy of the model in predicting EUV conversion efficiency (EUV-CE) across a wide range of laser parameters.
The work systematically investigated the dependence of optimum pulse width and target size on laser wavelength. This research is motivated by the need for more efficient and compact EUV sources, potentially utilizing solid-state mid-infrared lasers as alternatives to current CO2 lasers.
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